1. Repositório PUCRS
  2. PUBLICAÇÕES CIENTÍFICAS
  3. Artigo de Periódico
Please use this identifier to cite or link to this item: https://hdl.handle.net/10923/12699
Type: Article
Title: Changes in the Young Modulus of hafnium oxide thin films
Author(s): VARGAS, ANDRÉ LUÍS MARIN
DE ARAÚJO RIBEIRO, FABIANA
Roberto Hübler
In: Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms (Print)
Issue Date: 2015
Volume: 359
First page: 277
Keywords: caracterização de superfícies
Magnetron Sputtering
RBS
Propriedades mecânicas
URI: http://hdl.handle.net/10923/12699
DOI: DOI:10.1016/j.nimb.2015.07.096
ISSN: 0168-583X
Appears in Collections:Artigo de Periódico

Files in This Item:
File Description SizeFormat 
Changes_in_the_Young_Modulus_of_hafnium_oxide_thin_films.pdf1,91 MBAdobe PDFOpen
View
Show full item record See statistics Search for other versions of fulltext via SFX


All Items in PUCRS Repository are protected by copyright, with all rights reserved, and are licensed under a Creative Commons Attribution-NonCommercial 4.0 International License. Read more.