Please use this identifier to cite or link to this item: http://hdl.handle.net/10923/12701
Type: Article
Title: Structural and Mechanical Properties of Zr-Si-N Thin Films Prepared by Reactive Magnetron Sputtering
Author(s): FREITAS, FLÁVIO GUSTAVO RIBEIRO
Roberto Hübler
SOARES, GABRIEL
CONCEIÇÃO, AMANDA GARDÊNIA SANTOS
VITÓRIA, EDSON REIS
CARVALHO, RENATA GOMES
TENTARDINI, EDUARDO KIRINUS
In: Materials Research (São Carlos. Impresso)
Issue Date: 2015
Volume: epub
First page: 1980-5373
Last page: 0
URI: http://hdl.handle.net/10923/12701
DOI: DOI:10.1590/1516-1439.336214
ISSN: 1516-1439
Appears in Collections:Artigo de Periódico



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