| Campo DC | Valor | Idioma |
|---|
| dc.contributor.author | VARGAS, ANDRÉ LUÍS MARIN | - |
| dc.contributor.author | DE ARAÚJO RIBEIRO, FABIANA | - |
| dc.contributor.author | Roberto Hübler | - |
| dc.date.accessioned | 2018-09-04T20:21:37Z | - |
| dc.date.available | 2018-09-04T20:21:37Z | - |
| dc.date.issued | 2015 | - |
| dc.identifier.issn | 0168-583X | - |
| dc.identifier.uri | http://hdl.handle.net/10923/12699 | - |
| dc.language.iso | en | - |
| dc.relation.ispartof | Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms (Print) | - |
| dc.rights | openAccess | - |
| dc.subject | caracterização de superfícies | - |
| dc.subject | Magnetron Sputtering | - |
| dc.subject | RBS | - |
| dc.subject | Propriedades mecânicas | - |
| dc.title | Changes in the Young Modulus of hafnium oxide thin films | - |
| dc.type | Article | - |
| dc.date.updated | 2018-09-04T20:21:36Z | - |
| dc.identifier.doi | DOI:10.1016/j.nimb.2015.07.096 | - |
| dc.jtitle | Nuclear Instruments & Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms (Print) | - |
| dc.volume | 359 | - |
| dc.spage | 277 | - |
| Aparece nas Coleções: | Artigo de Periódico
|
