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Please use this identifier to cite or link to this item: https://hdl.handle.net/10923/20283
Type: Article
Title: Effect of hafnium contaminant present in zirconium targets on sputter deposited ZrN thin films
Author(s): FERNANDEZ, D.A.R.
BRITO, B.S.S.
SANTOS, I.A.D.
SOARES, V.F.D.
TERTO, A.R.
DE OLIVEIRA, G.B.
Roberto Hübler
BATISTA, W.W.
Tentardini, E.K.
In: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Issue Date: 2020
Volume: 462
First page: 90
Last page: 94
URI: https://hdl.handle.net/10923/20283
DOI: DOI:10.1016/j.nimb.2019.11.005
ISSN: 0168-583X
Appears in Collections:Artigo de Periódico

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